- PII
- 10.31857/S0044457X24010059-1
- DOI
- 10.31857/S0044457X24010059
- Publication type
- Article
- Status
- Published
- Authors
- Volume/ Edition
- Volume 69 / Issue number 1
- Pages
- 43-48
- Abstract
- Owing to its unique properties, oxygen-free ceramics are promising for use in various branches of technology. The inclusion of metals or their compounds in this ceramic significantly expands the possibilities of its application. Therefore, methods for the synthesis of such composites are being actively developed. One of the ways to obtain such films is the deposition from the gas phase. Thermodynamic modeling allows you to choose the conditions for this process. In this work, thermodynamic modeling of the CVD process in the Ni-Si-C-H system, where nickelocene and silane were precursors, was carried out. The results of the work can be useful for developing methods for obtaining film materials based on SiC and nickel-containing phases.
- Keywords
- термодинамическое моделирование система Ni–Si–C–H химическое осаждение из газовой фазы
- Date of publication
- 15.01.2024
- Year of publication
- 2024
- Number of purchasers
- 0
- Views
- 47
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