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RAS Chemistry & Material ScienceЖурнал неорганической химии Russian Journal of Inorganic Chemistry

  • ISSN (Print) 0044-457X
  • ISSN (Online) 3034-560X

Thermodynamic Modeling and Experimental Implementation of the Synthesis of Vanadium Oxide Films

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PII
10.31857/S0044457X23600019-1
DOI
10.31857/S0044457X23600019
Publication type
Status
Published
Authors
V. A. Shestakov
  • Affiliation: Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
Volume/ Edition
Volume 68 / Issue number 5
Pages
651-657
Abstract
The paper describes the thermodynamic modeling and experimental study of the synthesis of vanadium oxide films at various temperatures from the tetrakis(ethylmethylaminovanadium) V[NC3H8]4 precursor in the presence of oxygen in an argon atmosphere. The thermodynamic modeling was carried out using the calculation of chemical equilibria based on the minimization of the Gibbs energy of the system. In the experimental part of the paper, the films were synthesized by the atomic layer deposition procedure. The thermodynamic modeling and experimental results agree with each other and can be used to develop procedures for the synthesis of film coatings based on vanadium oxides.
Keywords
термодинамическое моделирование атомно-слоевое осаждение тонкие пленки диоксид ванадия пентаоксид ванадия
Date of publication
01.05.2023
Year of publication
2023
Number of purchasers
0
Views
49

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